Semiconductor Equipment & Materials
Software
1. SECS GEM
2. MES Host
2. MES Host
Specialty Materials
Sputter Targets, E-Beam Materials
UTI Stepper Parts & Equipment Repair and Exchange
Supports customer in refurbished UT stepper equipment, parts and contract service. Offers a range of specialty materials like Silicon Wafers, Targets/Crucibles and Integrate Small Systems for the semiconductor market.
• For model 990, 1000, 1100, 1500, 1700, 1900 Ultratech steppers
• Available sizes: 3", 4", 5", 6" for round substrates
• Fully refurbished and operational
• Demonstration can be conducted in our facility in Rocklin, Ca.
Wafers & Plates
Silicon Wafer, Glass Wafer, Quartz Carrier, Sapphire Plate